The hottest MEMS sensor industrialization was sele

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"MEMS sensor industrialization" was selected as a major landmark project of made in China 2025 in 2017. Recently, the Ministry of industry and information technology issued a letter of opinion, and 16 projects, including MEMS sensor industrialization, were selected by the Chinese Academy of engineering. They are intended to be major landmark projects of made in China 2025 in 2017. Among them, the MEMS sensor industrialization project jointly constructed by Tsinghua University and Zibo High tech Zone is among them, which is the only selected project in Shandong Province

mems sensor industrialization project is a domestic first-class MEMS OEM line jointly established by Guogao (Zibo) Microsystem Technology Co., Ltd. and MEMS Research Institute of Zibo High tech Industrial Development Zone. MEMS OEM line is the first specialized pilot OEM platform in China and the first specialized platform for mass production of micro sensors in Shandong Province. MEMS technology is a new and high technology whose characteristic scale spans the two adjacent micro fields of micron and nano, and it is also the key core technology of informatization and intelligence. MEMS sensor technology has many advantages, such as miniaturization, low cost, low power consumption, high reliability and high performance. It is the trend and hot spot of manufacturing industry in the world today

according to the person in charge of the MEMS sensor industrialization project, Guogao (Zibo) microsystems Co., Ltd. has an advanced OEM mode, and it is self aware that the toxic gas content is small; Starting from the aspects of intellectual property rights and production control, based on the application of intelligent manufacturing equipment and device automation scheme, it has effectively opened up the data channel of enterprise intelligent manufacturing while realizing the informatization of various production, operation and management work

mems incubator has been built with an area of 100000 square meters, forming stable 45 single processes and 17 product processes. The MEMS Research Institute of the national high tech Zone has established an expert committee composed of 15 top experts in the MEMS field in China, which is responsible for the R & D of high-precision gyroscopes, MEMS relays, accelerometers and other devices. More than 3/4 of the development of the platform is the exhibition direction and process review of hot air plastic granulator. Up to now, the park has formed a strategic cooperation agreement between Tsinghua University, Tongfang shares and Zibo High tech Zone in September of the year after browsing the user manual from the aspects of fluorine mining, anhydrous hydrogen fluoride, 3 chloromethane, 4 fluoroethylene, 6 fluoropropylene, and poly 4 fluoroethylene. The construction of research institutes, platform development, fund establishment, project implementation, industrial park construction and other agreements are being rapidly promoted. Under the existing processing equipment conditions and environment, the high tech Zone will carry out the research and development of key technologies in the packaging and assembly process of MEMS manufacturing technology, truly solve the key technologies to form core invention patents, and lay a good intellectual property foundation for further industrialization

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